Ti a bo sputtering Magnetron jẹ ọna iboji oru tuntun ti ara, ni akawe pẹlu ọna ti a bo evaporation iṣaaju, awọn anfani rẹ ni ọpọlọpọ awọn aaye jẹ iyalẹnu pupọ.Gẹgẹbi imọ-ẹrọ ti ogbo, a ti lo sputtering magnetron ni ọpọlọpọ awọn aaye.
Ilana sputtering Magnetron:
Aaye oofa orthogonal ati aaye ina ni a ṣafikun laarin ọpa ibi-afẹde sputtered (cathode) ati anode, ati gaasi inert ti a beere (nigbagbogbo gaasi Ar) ti kun ni iyẹwu igbale giga.Oofa ayeraye n ṣe aaye oofa gaus 250-350 lori dada ti ohun elo ibi-afẹde, ati aaye itanna orthogonal ti wa ni akojọpọ pẹlu aaye ina mọnamọna giga.Labẹ ipa ti aaye ina, Ar gaasi ionization sinu awọn ions rere ati awọn elekitironi, ibi-afẹde ati ni titẹ odi kan, lati ibi-afẹde lati ọpa nipasẹ ipa ti aaye oofa ati ilosoke iṣeeṣe ionization gaasi, ṣe pilasima iwuwo giga kan nitosi cathode, Ar ion labẹ awọn iṣẹ ti lorentz agbara, titẹ soke lati fo si awọn afojusun dada, bombarding dada afojusun ni a ga iyara, Awọn sputtered awọn ọta lori afojusun tẹle awọn opo ti ipa iyipada ati ki o fò kuro lati awọn afojusun dada pẹlu ga kainetik. agbara si fiimu ifisilẹ sobusitireti.
Sisọtọ Magnetron ni gbogbogbo pin si awọn oriṣi meji: sputtering DC ati RF sputtering.Awọn opo ti DC sputtering ẹrọ ni o rọrun, ati awọn oṣuwọn ni sare nigbati sputtering irin.Lilo ti RF sputtering jẹ gbooro sii, ni afikun si sputtering conductive ohun elo, sugbon tun sputtering ti kii-conductive ohun elo, sugbon tun ifaseyin sputtering igbaradi ti oxides, nitrides ati carbides ati awọn miiran yellow ohun elo.Ti igbohunsafẹfẹ ti RF ba pọ si, o di sputtering pilasima makirowefu.Ni lọwọlọwọ, itanna cyclotron resonance (ECR) iru makirowefu sputtering pilasima ni a lo nigbagbogbo.
Ohun elo ibi-afẹde ti a bo Magnetron sputtering:
Ohun elo ibi-afẹde irin, ohun elo ti a fi bo alloy sputtering ohun elo, ohun elo ti a fi bo seramiki, boride seramiki sputtering afojusun, carbide seramiki sputtering awọn ohun elo, fluoride seramiki sputtering ohun elo, nitride seramiki sputtering awọn ohun elo ibi-afẹde, oxide seramiki afojusun, selenide seramiki sputtering. silicide seramiki sputtering afojusun ohun elo, sulfide seramiki sputtering ohun elo, Telluride seramiki sputtering afojusun, miiran seramiki afojusun, chromium-doped silikoni oxide seramiki afojusun (CR-SiO), indium phosphide afojusun (InP), asiwaju arsenide afojusun (PbAs), indium arsenide afojusun (InAs).
Akoko ifiweranṣẹ: Oṣu Kẹjọ-03-2022