Pẹlu ilosoke ti ibeere ọja, awọn oriṣi ati siwaju sii ti awọn ibi-afẹde sputtering ti wa ni imudojuiwọn nigbagbogbo.Diẹ ninu awọn faramọ ati diẹ ninu awọn ko mọ si awọn alabara.Ni bayi, a yoo fẹ lati pin pẹlu rẹ kini iru awọn ibi-afẹde sputtering magnetron.
Ibi-afẹde sputtering ni awọn iru wọnyi: ibi-afẹde ti a bo irin, ibi-afẹde ohun elo alloy sputtering, ibi-afẹde seramiki sputtering ibi-afẹde, ibi-afẹde sputtering seramiki, ibi-afẹde seramiki carbide, ibi-afẹde sputtering seramiki fluoride, ibi-afẹde sputtering seramiki nitride, ibi-afẹde seramiki seramiki, ibi-afẹde seramiki sputtering selenide. , Silicide seramiki sputtering afojusun, sulfide seramiki sputtering afojusun, telluride seramiki sputtering afojusun, miiran seramiki afojusun, Chromium doped silicon oxide seramiki afojusun (CR SiO), indium phosphide afojusun (INP), asiwaju arsenide afojusun (pbas), indium arsenide afojusun (InAs ).
Sisọtọ Magnetron ti pin si awọn oriṣi meji: sputtering DC ati RF sputtering.Ilana ti ohun elo sputtering DC jẹ rọrun, ati pe oṣuwọn rẹ tun yara nigbati o ba n tu irin.RF sputtering jẹ lilo pupọ.Ni afikun si sputtering conductive data, o tun le sputter ti kii-conductive data.Ni akoko kanna, ibi-afẹde sputtering tun ṣe itusilẹ ifaseyin lati mura data agbo gẹgẹbi awọn oxides, nitrides ati awọn carbides.Ti igbohunsafẹfẹ RF ba pọ si, yoo di sputtering pilasima makirowefu.Ni lọwọlọwọ, itanna cyclotron resonance (ECR) makirowefu sputtering pilasima ni a lo nigbagbogbo.
Akoko ifiweranṣẹ: Oṣu Karun-18-2022