Ọpọlọpọ awọn olumulo gbọdọ ti gbọ nipa ọja ti ibi-afẹde sputtering, ṣugbọn ilana ti ibi-afẹde sputtering yẹ ki o jẹ aimọ.Bayi, olootu tiOhun elo Pataki Oloro(RSM) mọlẹbi magnetron sputtering agbekale ti sputtering afojusun.
Aaye oofa orthogonal ati aaye ina ni a ṣafikun laarin elekiturodu ibi-afẹde sputtered (cathode) ati anode, gaasi inert ti a beere (gbogbo Ar gaasi) ti kun sinu iyẹwu igbale giga, oofa ti o yẹ jẹ fọọmu aaye oofa 250 ~ 350 Gauss lori dada ti data ibi-afẹde, ati aaye itanna eleto orthogonal ti wa ni akoso pẹlu aaye ina mọnamọna giga-giga.
Labẹ ipa ti aaye ina, gaasi Ar jẹ ionized sinu awọn ions rere ati awọn elekitironi.A awọn odi ga foliteji ti wa ni afikun si awọn afojusun.Ipa ti aaye oofa lori awọn elekitironi ti o jade lati ibi ibi-afẹde ati iṣeeṣe ionization ti ilosoke gaasi ṣiṣẹ, ṣiṣe pilasima iwuwo giga nitosi cathode.Labẹ ipa ti Lorentz agbara, Ar ions yara si ibi ibi-afẹde ati bombard oju ibi-afẹde ni iyara ti o ga pupọ, Awọn ọta sputtered lori ibi-afẹde tẹle ilana iyipada ipa ati fò kuro ni oju ibi-afẹde si sobusitireti pẹlu agbara kainetik giga lati beebe awọn fiimu.
Sisọtọ Magnetron ni gbogbogbo pin si awọn oriṣi meji: sputtering Tributary ati RF sputtering.Ilana ti ohun elo sputtering tributary jẹ rọrun, ati pe oṣuwọn rẹ tun yara nigbati o ba n tu irin.RF sputtering jẹ lilo pupọ.Ni afikun si sputtering conductive ohun elo, o tun le sputter ti kii-conductive ohun elo.Ni akoko kanna, o tun ṣe ifaseyin sputtering lati mura awọn ohun elo ti oxides, nitrides, carbides ati awọn miiran agbo.Ti igbohunsafẹfẹ RF ba pọ si, yoo di sputtering pilasima makirowefu.Bayi, itanna cyclotron resonance (ECR) makirowefu sputtering pilasima ti wa ni lilo wọpọ.
Akoko ifiweranṣẹ: Oṣu Karun-31-2022