Gẹgẹbi gbogbo wa ṣe mọ, ọpọlọpọ awọn pato ti awọn ibi-afẹde sputtering, ati awọn aaye ohun elo wọn tun gbooro pupọ.Awọn oriṣi awọn ibi-afẹde ti o wọpọ lo ni awọn aaye oriṣiriṣi tun yatọ.Loni, jẹ ki a kọ ẹkọ nipa isọdi ti awọn aaye ohun elo ibi-afẹde sputtering pẹlu olootu ti RSM!
1, Definition ti sputtering afojusun
Sputtering jẹ ọkan ninu awọn imọ-ẹrọ akọkọ fun igbaradi awọn ohun elo fiimu tinrin.O nlo awọn ions ti a ṣe nipasẹ orisun ion lati mu yara ati pejọ ni igbale lati dagba ina ion iyara to ga, bombard dada ti o lagbara, ati awọn ions ṣe paarọ agbara kainetic pẹlu awọn ọta lori aaye ti o lagbara, ki awọn ọta ti o wa lori ibi ti o lagbara. dada ti wa ni niya lati ri to ati nile lori sobusitireti dada.Awọn ohun elo ti a fi bombarded jẹ ohun elo aise fun mimuradi fiimu tinrin ti a gbe silẹ nipasẹ itọlẹ, eyiti a pe ni ibi-afẹde sputtering.
2, Ipinsi ti awọn aaye ohun elo ibi-afẹde sputtering
1. Semikondokito afojusun
(1) Awọn ibi-afẹde ti o wọpọ: awọn ibi-afẹde ti o wọpọ ni aaye yii pẹlu awọn irin aaye yo to gaju bii tantalum / Ejò / titanium / aluminiomu / goolu / nickel.
(2) Lilo: ni akọkọ lo bi awọn ohun elo aise bọtini fun awọn iyika iṣọpọ.
(3) Awọn ibeere iṣẹ: awọn ibeere imọ-ẹrọ giga fun mimọ, iwọn, iṣọpọ, ati bẹbẹ lọ.
2. Àkọlé fun alapin nronu àpapọ
(1) Awọn ibi-afẹde ti o wọpọ: awọn ibi-afẹde ti o wọpọ ni aaye yii pẹlu aluminiomu / Ejò / molybdenum / nickel / Niobium / silicon / chromium, ati bẹbẹ lọ.
(2) Lilo: iru ibi-afẹde yii ni a lo pupọ julọ fun awọn oriṣi awọn fiimu agbegbe nla gẹgẹbi awọn TV ati awọn iwe ajako.
(3) Awọn ibeere iṣẹ: awọn ibeere giga fun mimọ, agbegbe nla, iṣọkan, ati bẹbẹ lọ.
3. Ohun elo ibi-afẹde fun sẹẹli oorun
(1) Awọn ibi-afẹde ti o wọpọ: aluminiomu / Ejò / molybdenum / chromium / ITO / Ta ati awọn ibi-afẹde miiran fun awọn sẹẹli oorun.
(2) Lilo: o kun lo ninu "window Layer", idankan Layer, elekiturodu ati conductive film.
(3) Awọn ibeere ṣiṣe: awọn ibeere imọ-ẹrọ giga ati iwọn ohun elo jakejado.
4. Àkọlé fun ipamọ alaye
(1) Awọn ibi-afẹde ti o wọpọ: awọn ibi-afẹde ti o wọpọ ti cobalt / nickel / ferroalloy / chromium / tellurium / selenium ati awọn ohun elo miiran fun ibi ipamọ alaye.
(2) Lilo: iru ohun elo ibi-afẹde yii ni a lo nipataki fun ori oofa, Layer aarin ati Layer isalẹ ti awakọ opiti ati disiki opiti.
(3) Awọn ibeere ṣiṣe: iwuwo ipamọ giga ati iyara gbigbe giga ni a nilo.
5. Àkọlé fun iyipada ọpa
(1) Awọn ibi-afẹde ti o wọpọ: awọn ibi-afẹde ti o wọpọ gẹgẹbi titanium / zirconium / chromium aluminiomu alloy ti a ṣe atunṣe nipasẹ awọn irinṣẹ.
(2) Lilo: a maa n lo fun imuduro dada.
(3) Awọn ibeere iṣẹ: awọn ibeere iṣẹ giga ati igbesi aye iṣẹ pipẹ.
6. Awọn ibi-afẹde fun awọn ẹrọ itanna
(1) Awọn ibi-afẹde ti o wọpọ: awọn ibi-afẹde aluminiomu alloy / silicide ti o wọpọ fun awọn ẹrọ itanna
(2) Idi: gbogbo lo fun tinrin film resistors ati capacitors.
(3) Awọn ibeere iṣẹ: iwọn kekere, iduroṣinṣin, iye iwọn otutu resistance kekere
Akoko ifiweranṣẹ: Jul-27-2022